Excimer laser lithography at present and next step.
نویسندگان
چکیده
منابع مشابه
Contact and proximity lithography using 193nm Excimer Laser in Mask Aligner
In this paper we describe the use of an Excimer laser for full-field lithography in a Mask Aligner. The DUV light from the Excimer laser is homogenized by using micro lens based optical integrators instead of a macro lens-array. A simulation of the intensity distribution for 5 μm squares was performed to visualize the diffraction effects and to show the potential of 193 nm illumination. It is d...
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Laser technology is used in many basic and clinical disciplines and specialties, and it has played an important role in promoting the development of ophthalmology, especially corneal refractive surgery. We provide an overview of the evolution of laser technology for use in refractive and other ophthalmologic surgeries, mainly focusing on two types of lasers and their applications. First, we dis...
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This paper reports simulation and experimental details of a novel phase shifting technique based on laser interferomeiry. Phase shifting is one of the most promising techniques L 2 for the fabrication ofhigh density DRAM's. In recent years many kinds of phase shifting methods have been proposed to extend the resolution limit and contrast of image patterns . These techniques however, have severa...
متن کاملStep and Flash Imprint Lithography
The goal of the SFIL development program is to enable patterning of sub-100 nm features at room temperature and with minimal applied pressure. We believe the use of low viscosity materials and photopolymerization chemistry will enable SFIL to achieve the throughput required for use in the microelectronics industry. Additionally, the rigid transparent imprint template used in SFIL enables a prec...
متن کامل[Mitomycin C and excimer laser].
Mitomycin C is an antimetabolite agent that blocks DNA and RNA replication and protein synthesis. It has been used in several ophthalmologic areas, and recently as a modulator of corneal wound healing in excimer laser surgeries. A single application of mitomycin C during surface corneal photoablative surgery seems a safe and efficient therapeutic option for eyes with corneal opacity and/or as p...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1987
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.53.1663